Load-locks for high throughput and come with a choice of two (Axis II), three (Axis III) and four (Axis IV) target configurations.



KDF / MRC 

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Sputtering System 

CTI CRYOPUMP (REBUILT) ON LOAD LOCK

             3 CATHODES
             LOAD LOCK

             REBUILT CTI 8 CRYOPUMP WITH CTI COMPRESSOR
             REBUILT DUAL STAGE MECHANICAL PUMP 

NEW TOUCH SCREEN CONTROLLER: 
     TOTAL POWER AND # OF SCANS FOR SPUTTER P/S  FOR PROGRAM ON TOUCH SCREEN                                                     

              POWER AND TIME SETTINGS FOR ETCH  P/S  FOR PROGRAM ON TOUCH SCREEN                                                                  

              SELECTION OF 10 RECIPE/PROGRAMS WITH ALL SETTINGS ABOVE ON TOUCH SCREEN                                                          

              MFC  CONTROL OF VACUUM LEVEL FOR PROGRAM ON TOUCH SCREEN  

943

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KDF / MRC

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KDF / MRC

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KDF / MRC

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KDF / MRC

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KDF / MRC

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KDF / MRC

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