
Description
PVD systemConfiguration
(Qty 3) PVD chambers, positions 3/4/5 Degas chamber, position 1 PM5 hot chuck and pyrometer Brooks control system upgrade (2025) with new aligner Brooks Magnatran MAG 7.1 dual-pan robot, up to 860mm extension Brooks control system with CDM (Qty 2) Load-lock elevators Adapter flange for active wafer centering Transport coolerOEM Model Description
None ProvidedDocuments
No documents
CATEGORY
PVD / Sputtering
Last Verified: 3 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
155365
Wafer Sizes:
Unknown
Vintage:
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
EVATEC / UNAXIS / OERLIKON / BALZERS
CLUSTERLINE 200 II CW
CATEGORY
PVD / Sputtering
Last Verified: 3 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
155365
Wafer Sizes:
Unknown
Vintage:
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
PVD systemConfiguration
(Qty 3) PVD chambers, positions 3/4/5 Degas chamber, position 1 PM5 hot chuck and pyrometer Brooks control system upgrade (2025) with new aligner Brooks Magnatran MAG 7.1 dual-pan robot, up to 860mm extension Brooks control system with CDM (Qty 2) Load-lock elevators Adapter flange for active wafer centering Transport coolerOEM Model Description
None ProvidedDocuments
No documents