Skip to main content
Moov logo
Moov Icon
CELLO OHMIKER-90BS (S006)
    Description
    Used. Just taken offline in 2021/07 and not able to run the equipment now. If there are any questions or you need more info, please contact us.
    Configuration
    1. Reactor Chamber: SUS 304, approximately: 900 diameter x H1,000 (mm) 2. Vacuum Pump: Ulvac Cryo-U 16H, cryogenics pump with C30VR compressor(16,000 l/s) and HanBell PS-602, Oil-free Dry pump station system(10,000 liters/min), with 1 roots pump and 1 oil-free dry pump 3. Sputter Cathodes: 2 X Cello, Plane rectangular magnetron enhanced sputter cathodes for general material (20" X 5") 4. RF Pre-Cleaning Set: AE Cesar, RF 1.0 kW power supply and auto-matching network with RF electrode set in chamber 5. Substrate Holder: 1 set of 12 substrate carriers pre-machined to accept at least total 36 pieces of 4" diameter wafers. (Backside fitting)
    OEM Model Description
    None Provided
    Documents

    No documents

    CELLO

    OHMIKER-90BS (S006)

    verified-listing-icon

    Verified

    CATEGORY
    PVD / Sputtering

    Last Verified: Over 30 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    47751

    Wafer Sizes:

    Unknown

    Vintage:

    2012

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    CELLO OHMIKER-90BS (S006)

    CELLO

    OHMIKER-90BS (S006)

    PVD / Sputtering
    Vintage: 2012Condition: Used
    Last VerifiedOver 30 days ago

    CELLO

    OHMIKER-90BS (S006)

    verified-listing-icon
    Verified
    CATEGORY
    PVD / Sputtering
    Last Verified: Over 30 days ago
    listing-photo-6d0130a4050849d3afbbb82ad4574454-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    47751

    Wafer Sizes:

    Unknown

    Vintage:

    2012

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Used. Just taken offline in 2021/07 and not able to run the equipment now. If there are any questions or you need more info, please contact us.
    Configuration
    1. Reactor Chamber: SUS 304, approximately: 900 diameter x H1,000 (mm) 2. Vacuum Pump: Ulvac Cryo-U 16H, cryogenics pump with C30VR compressor(16,000 l/s) and HanBell PS-602, Oil-free Dry pump station system(10,000 liters/min), with 1 roots pump and 1 oil-free dry pump 3. Sputter Cathodes: 2 X Cello, Plane rectangular magnetron enhanced sputter cathodes for general material (20" X 5") 4. RF Pre-Cleaning Set: AE Cesar, RF 1.0 kW power supply and auto-matching network with RF electrode set in chamber 5. Substrate Holder: 1 set of 12 substrate carriers pre-machined to accept at least total 36 pieces of 4" diameter wafers. (Backside fitting)
    OEM Model Description
    None Provided
    Documents

    No documents

    Similar Listings
    View All
    CELLO OHMIKER-90BS (S006)

    CELLO

    OHMIKER-90BS (S006)

    PVD / SputteringVintage: 2012Condition: UsedLast Verified: Over 30 days ago