Description
Materials used – Ta2O5, Nb2O5, SiO2 S2 (faulty, for Ta, Nb) SSC 300/320 RT DC, P/N 3010838/001 S3 (for Ta, Nb) SSC 300/320 RT RF, P/N 3022523/001 S6 ( Si) SSC 300/320 RT RF, P/N 3022883/001 Ion source S4 PSC 301 P/N n/a DC AE pinnacle plus 10kW M/N 3152536-360 E DC AE pinnacle plus 10kW M/N 3152536-360 E AE Cesar 1320 RF power generator 2kW M/N 61300073 J (condition unknown) AE Cesar 1350 RF power generator 5kW M/N 61300109 L AE navio match network M/N 3155403-001 B AE navio match network M/N 3155405-001 C (condition unknown) AE navio match network M/N 3155405-001 C (condition unknown) TDK-Lambda GENH30-25 LOC-519A163-0001 2pc Manuals/pdf's attached below Comes with CLIVET WSA-XIN131Configuration
2x magnetrons RF plasma source - Circular PSC 301 GSM 1100 Broadband Monitoring System 14 planet batch module + witness Single cassette load-lockOEM Model Description
None ProvidedDocuments
EVATEC / BALZERS
RADIANCE
Verified
CATEGORY
PVD / Sputtering
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
84201
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
EVATEC / BALZERS
RADIANCE
CATEGORY
PVD / Sputtering
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
84201
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available