
Description
Nimbus 314XP High Throughput Sputter Deposition system Details AttachedConfiguration
Software WinXP, Nimbus Version 3.18 Configured for 200mm / 8” (100mm / 4” and 150mm / 6” capable) 3 – Cassette platforms Load Lock / Cooling Station Pre-Etch Chamber Sputter chamber, five position source pentagon, two magnatrons installed (M4-DC & G-1, need to be verified). 3 – CTI 8 cryo pumps, 1 – etch chamber, 2 – sputter chamberOEM Model Description
None ProvidedDocuments
Verified
CATEGORY
PVD / Sputtering
Last Verified: 16 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
139826
Wafer Sizes:
Unknown
Vintage:
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASM / TEL / NEXX
NIMBUS 314
CATEGORY
PVD / Sputtering
Last Verified: 16 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
139826
Wafer Sizes:
Unknown
Vintage:
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available