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ASM / TEL / NEXX NIMBUS 314
    Description
    Nimbus 314XP High Throughput Sputter Deposition system Details Attached
    Configuration
    Software WinXP, Nimbus Version 3.18 Configured for 200mm / 8” (100mm / 4” and 150mm / 6” capable) 3 – Cassette platforms Load Lock / Cooling Station Pre-Etch Chamber Sputter chamber, five position source pentagon, two magnatrons installed (M4-DC & G-1, need to be verified). 3 – CTI 8 cryo pumps, 1 – etch chamber, 2 – sputter chamber
    OEM Model Description
    None Provided
    Documents
    File icon

    nexx_nimbus.pdf

    ASM / TEL / NEXX

    NIMBUS 314

    verified-listing-icon

    Verified

    CATEGORY
    PVD / Sputtering

    Last Verified: 16 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    139826

    Wafer Sizes:

    Unknown

    Vintage:

    2006

    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
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    ASM / TEL / NEXX NIMBUS 314

    ASM / TEL / NEXX

    NIMBUS 314

    PVD / Sputtering
    Vintage: 2006Condition: Used
    Last Verified16 days ago

    ASM / TEL / NEXX

    NIMBUS 314

    verified-listing-icon
    Verified
    CATEGORY
    PVD / Sputtering
    Last Verified: 16 days ago
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    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    139826

    Wafer Sizes:

    Unknown

    Vintage:

    2006

    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Nimbus 314XP High Throughput Sputter Deposition system Details Attached
    Configuration
    Software WinXP, Nimbus Version 3.18 Configured for 200mm / 8” (100mm / 4” and 150mm / 6” capable) 3 – Cassette platforms Load Lock / Cooling Station Pre-Etch Chamber Sputter chamber, five position source pentagon, two magnatrons installed (M4-DC & G-1, need to be verified). 3 – CTI 8 cryo pumps, 1 – etch chamber, 2 – sputter chamber
    OEM Model Description
    None Provided
    Documents
    File icon

    nexx_nimbus.pdf

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