TEL / TOKYO ELECTRON
TRIASe+ Ti/TiN
PVD / CVD / ALD
Vintage: 2014
Condition: As-Is
Last Verified
Over 60 days ago
TRIASe+ Ti/TiN
Category
PVD / CVD / ALDOverview
Triase+™ Ti/TiN is a 300mm single-wafer metal CVD system for high step coverage Ti/TiN film formation using TiCl4.
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