Overview

The Triase+™ SPAi system inherits its predecessors’ reliability, to equally enhance system throughput, achieve higher productivity, lower power consumption (which reduces CO2 emissions), and a smaller footprint. An integrated bias function helps to produce high quality film while maintaining excellent coverage, and making the system suitable for critical FEOL applications including gate nitridation, gate recovery oxidation, STI liner oxidation, and high-k nitridation.