TEL / TOKYO ELECTRON
TRIAS HIGH-k
PVD / CVD / ALD
Vintage: 2010
Condition: As-Is
Last Verified
Over 30 days ago
Trias High-k CVD system is a 300mm single-wafer cluster tool designed to produce thin-film materials required for the advanced gate stack, which will be incorporated in the most advanced semiconductor devices at the 45nm node and beyond.
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