EDWARDS

QDP80 / QMB500

STP-A2203WV

iL70N

IH1000

IH1800

IH80

"The QDP80 DRYSTAR Dry pump is available as a stand alone unit or in combination with a QMB500hydrokinetic drive mechanical booster, for applications where more pumping speed and/or lower vacuum levels are required - no pressure switches required.

The scope of supply includes as standard an in-line pressure regulator and gauge for facilitating the shaft seal purge, a cleanable stainless steel exhaust silencer, and exhaust check valve. The QDP80 Drystar dry pump will also be supplied with a full accessory fitting kit and will be mounted to the dedicated chassis and castors to enable easy movement of the pump.

There is no special control system requirements for pump operation, existing electrical control equipment can be modified to provide simple off/on operation and interface to the (fitted) pump thermal snap switches. Details of how to achieve this are available in the Drystar 80 Electrical Box upgrade guide."

QDP80

iXH4550HT

iXH6045H

The Edwards QDP40 is a dry vacuum pump that operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated

QDP40

GX600L

iXH3030

iXH610

E2M18

EPX180LE

"The iQ Drypumping System is a microprocessor-controlled, modular, dry pump package with advanced control and monitoring capabilities. It can be controlled locally via a handheld LCD panel or remotely through a customized tool interface. All major control elements are conveniently located within the system's footprint.

Equipped with integrated sensors, the iQ dry pumping system continuously monitors critical performance parameters and provides early warning of any issues. These sensors measure motor power, current, total and purge nitrogen flow, pump and motor temperatures, as well as additional parameters like exhaust gas back pressure, oil level, water flow, and exhaust gas temperature.

The iQ pumpset parameters can be easily monitored and displayed through various output devices, including handheld or panel-mounted control modules, local PCs or laptops, and OEM-specified tool interfaces. It offers seamless integration with fab-wide networks for comprehensive monitoring and control.
PC as part of a fab-wide network"

iQDP40

PHMB2400 + PRV 

iL70

HMB3000

iQDP80 / QMB250

IGX100L

E2M275

EPX500LE

QMB500

The iQ Drypumping System is a microprocessor-controlled, modular setup offering exceptional control and monitoring capabilities. Users can operate the system locally via a handheld LCD panel or remotely through a customizable interface. Integrated within the system's footprint, it boasts sensors that continuously track critical performance metrics, alerting of potential issues. These sensors monitor motor power, nitrogen flow, pump and motor temperatures, and more, with additional sensors available for exhaust gas back pressure, oil level, and water flow, among others. You can access and display the iQ pumpset data through various devices, including handheld modules, PCs, laptops, or even a fab-wide network.

iQDP80

iQDP80 / QMB1200

ESDP12

RV12

IH600

EPX180NE

ADP122 LM

QMB250

IXH1220H

EPX TWIN 180L

STP-301-U

E2M80

IF30K	

E2M5

STP-H2000K

IPX100A

iHs600F SMART AFM

iXL500Q 

E2M40

The Edwards STP-XA3203CV is a high-performance turbomolecular pump designed for efficient and quiet operation. It offers superior pumping speeds, exceptional reliability, and advanced control options. With a compact design, it saves space and is ideal for various industrial applications, ensuring seamless integration and precise adjustments for optimal performance. This pump is a top choice for industries requiring reliable and efficient vacuum solutions. For specific details, pricing, and availability, it's best to refer to the official Edwards website or authorized distributors.

STP-XA3203CV

E2M1.5 

The GV80 vacuum pump is capable of continuous operation with the ability to handle large volumes of condensable vapours. With clean, quiet pumping and minimal service disruption, the GV80 provides consistent output and repeatable pumping performance.

GV80

IH1800 HTX

iQDP40 / QMB250

QDP40/QMB250

The IQDP80 offers two distinct configurations based on the process requirement. For processes like CVD and ETCH, the iQ 80 pump comes combined with a Qmb 1200, 500, or 250 mechanical booster and is fully enclosed, featuring a harsh duty gas module and a dedicated pump display module, all powered by a three-phase electrical supply. Conversely, for clean processes such as Load Lock and PVD, the iQ 80 pump pairs with either a Qmb 500 or 250 mechanical booster and is similarly enclosed, but is equipped with a clean dry gas module and its own pump display module, still using a three-phase electrical supply.

iQDP80 / QMB500

QDP80/QMB250

QDP80 / QMB 250F

IGX600L

IGX6/100L

iXH1210H

IH600F AMF

STP A2203LVS

SCU-800

PHMB3000 + PRV

STP-XA2703BV2

E2M8

IH1800HTX MK5	

STP-A1303C

EXT75DX

04-NO26-98-810

iL600N

EPX500NE

two stage oil sealed rotary vane vacuum pumps

E2M175

iXH1820

EH1200

iGX600N

EH2600

iXH1220HTX

nXDS10i

IGX1000N

PN D37215000

IH1800NRV MK5	

EPX180L

EH500

IGX100M

 iF1800 

iH600 MK5

The iH160 system has an HCDP160 dry pump. The HCDP pump has an enclosed, water-cooled motor. The iH system is therefore suitable for applications in clean environments where fan cooling of motors is unacceptable.

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Top EDWARDS Pumps

QDP80 / QMB500

STP-A2203WV

iL70N

IH1000

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