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CVD, Furnace, Etch, RTPOEM Model Description
The dry compressor roots principle has proven itself in many areas of vacuum technology. Combined with dry or oil-sealed forevacuum pumps, RUVAC roots pumps are used very effectively to increase the pumping speed at low pressures, thus extending the operating pressure range of the fore-vacuum pumps. RUVAC roots pumps are available in three series with different motor drives. The RUVAC WA series uses air cooled, flange-mounted standard three phase motors. The RUVAC WS series are equipped with canned (rotor) motors in air-cooled or water-cooled versions. Each series consists of various sizes to always provide an optimized pumping speed for each application. All three series are available with or without integrated bypass valve (also known as pressure compensation valve).Documents
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LEYBOLD
RUVAC WS 501
Verified
CATEGORY
Pumps / Compressor
Last Verified: Over 60 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
97154
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LEYBOLD
RUVAC WS 501
CATEGORY
Pumps / Compressor
Last Verified: Over 60 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
97154
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
CVD, Furnace, Etch, RTPOEM Model Description
The dry compressor roots principle has proven itself in many areas of vacuum technology. Combined with dry or oil-sealed forevacuum pumps, RUVAC roots pumps are used very effectively to increase the pumping speed at low pressures, thus extending the operating pressure range of the fore-vacuum pumps. RUVAC roots pumps are available in three series with different motor drives. The RUVAC WA series uses air cooled, flange-mounted standard three phase motors. The RUVAC WS series are equipped with canned (rotor) motors in air-cooled or water-cooled versions. Each series consists of various sizes to always provide an optimized pumping speed for each application. All three series are available with or without integrated bypass valve (also known as pressure compensation valve).Documents
No documents