The Tencor P2 open frame offers users the flexibility to load samples up to 430mm by 430mm while the Tencor FP2 provides support for the flat panel industry by enabling scans of samples up to 630mm by 630mm.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

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Step Height Measurement System

- Long Scan Profiler Measurement.
- Standard Head with L type stylus.
- Installed in Clean-room.
- Fully refurbished.
- Can demonstrate any time.

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Tencor P-2 Step Height Measurement System

- Long Scan Profiler Measurement.
- Standard Head with L type stylus.
- Anti-bivration table.

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KLA/TENCOR P2
Scan Length: 210mm. (8″)

Scan Speed: 1 um/sec to 25mm/sec.

Vertical range: +/- 6.5um at 1A resolution & +/- 150um at 25A.

Vertical Linearity: 10A below 2000A, +/- .5% above 2000A.

Horizontal Resolution: 100A at 1 um/second

Scan speed up to 5000 data points per scan depending on scan speed and length.

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