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Description
Stylus surface profiler *. To be refurbished. *. Installed in Clean-room.Configuration
[Features] - Step height: Nanometers to 1000µ;m - Step height repeatability : 4 Å; ( 1σ, 1µ;m ) - Programmable stylus force from 0.5 –; 50mg (Option : 0.03 ~50mg ) - Scan full diameter of the sample without stitching for bow and film stress measurement - Fully motorized 200mm XY stage, Z stage, 360° theta stage and level stage - Dual view optics ( side and top ) - Fully automated with sequencing, pattern recognition [Applications] - Step Height mesurement (2D/3D) - Roughness and Waviness - Bow and Shape - Thin film Stress - Defect review ( Defect surface topography)OEM Model Description
The new Tencor P-7 and P-17 products feature industry-leading measurement precision, the highest resolution color camera available on a stylus platform, and new performance specifications for long-scan capability critical for bow and stress measurements.Documents
No documents
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
102009
Wafer Sizes:
8"/200mm
Vintage:
2017
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA
P-17
CATEGORY
Profiler
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
102009
Wafer Sizes:
8"/200mm
Vintage:
2017
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Stylus surface profiler *. To be refurbished. *. Installed in Clean-room.Configuration
[Features] - Step height: Nanometers to 1000µ;m - Step height repeatability : 4 Å; ( 1σ, 1µ;m ) - Programmable stylus force from 0.5 –; 50mg (Option : 0.03 ~50mg ) - Scan full diameter of the sample without stitching for bow and film stress measurement - Fully motorized 200mm XY stage, Z stage, 360° theta stage and level stage - Dual view optics ( side and top ) - Fully automated with sequencing, pattern recognition [Applications] - Step Height mesurement (2D/3D) - Roughness and Waviness - Bow and Shape - Thin film Stress - Defect review ( Defect surface topography)OEM Model Description
The new Tencor P-7 and P-17 products feature industry-leading measurement precision, the highest resolution color camera available on a stylus platform, and new performance specifications for long-scan capability critical for bow and stress measurements.Documents
No documents