The new Tencor P-7 and P-17 products feature industry-leading measurement precision, the highest resolution color camera available on a stylus platform, and new performance specifications for long-scan capability critical for bow and stress measurements.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

P-17

Stylus surface profiler

Applications:
- Step Height mesurements (2D/3D)
- Roughness and Waviness
- Bow and Shape
- Thin film Stress
- Defect review ( Defect surface topography)


kla_p17 repeatablity check.pdf

kla_p17.pdf

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