Description
ALPHA STEPConfiguration
No ConfigurationOEM Model Description
The Tencor P-1 Long Scan stylus profiler is the first in the industry to offer ultra-flat 200mm scans in a single profile, without the need to stitch. The release of the P-1 Long Scan profiler features a revolutionary new design, with industry-first innovations to the scanning stage, optics, and sensor technology-—innovations that provide rock-solid stability, unbeatable sensitivity and repeatability. The system features an ultra-flat scanning stage capable of high-resolution scans up to 200mm in a single scan, enabling characterization of surface roughness, waviness, and thin-film stress. The new stage is also the industry’s first 3D scanning stage, adding a third dimension to characterize surface topography. The system features the first top-view optics to provide a clear view of the sample, free of distortion from the traditional angled side-view. Finally, the sensor technology incorporates the industry’s first and only linear variable differential capacitor (LVDC), resulting in sub-Angstrom electronic resolution with a low moment of inertia, enabling low force control and reducing sensitivity to noise.Documents
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KLA
P-1
CATEGORY
Profiler
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
121283
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
ALPHA STEPConfiguration
No ConfigurationOEM Model Description
The Tencor P-1 Long Scan stylus profiler is the first in the industry to offer ultra-flat 200mm scans in a single profile, without the need to stitch. The release of the P-1 Long Scan profiler features a revolutionary new design, with industry-first innovations to the scanning stage, optics, and sensor technology-—innovations that provide rock-solid stability, unbeatable sensitivity and repeatability. The system features an ultra-flat scanning stage capable of high-resolution scans up to 200mm in a single scan, enabling characterization of surface roughness, waviness, and thin-film stress. The new stage is also the industry’s first 3D scanning stage, adding a third dimension to characterize surface topography. The system features the first top-view optics to provide a clear view of the sample, free of distortion from the traditional angled side-view. Finally, the sensor technology incorporates the industry’s first and only linear variable differential capacitor (LVDC), resulting in sub-Angstrom electronic resolution with a low moment of inertia, enabling low force control and reducing sensitivity to noise.Documents
No documents