Overview

Opus3 is a prober that is unique in the market for its ability to handle 6", 8", and 12" SEMI Standard wafers without the need for a change kit. It is compact in size, making it space-efficient, and offers high accuracy for consistent contact/probing and fast index time for higher throughput. It also has the ability to load a universal probe card. Some of its key features include reliable temperature control, a stiff and strong Z structure, map shift prevention, real-time recipe validation, an intelligent pin alignment algorithm, a smart probing route algorithm, a flat loader for the smartest footprint, and compatibility with all types of testers. Overall, Opus3 is a versatile and reliable prober that offers many benefits to its users.