Description
Comdel CX-2500/6.78 MHz 2500 W RF Generator, PN: FP3368R1 Description: The CX-2500 power supply has a power range of 2500 Watts with a fixed frequency of 6.78 MHz. The solid-state design provides low cost of ownership with high reliability. Applications: The CX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.Configuration
The Unit's Serial Number Tag Reads: Model Number: CX-2500/6.78 Serial Number: 091 Part Number: FP3368R1 Date of Manufacturing: 10/29/99 Specifications: Power Output: 2500 W Harmonic Distortion: Less than -30 dBc Power Requirements: 190-225 VAC; Three Phase; 50/60 Hz / 15 A typical Control I/O Connector: 25-pin subiminiature D type Std. Output Connector: Type-N Power Control: 0-10 VDC input for 0 to maximum-rated output Power Control Linearity: ≤ 2% of setting at power levels above 10% of rated power Frequency: Fixed Frequency of 6.78 MHz Dimensions: 7" H x 19" W x 21.5" D (17.8 cm x 48.3 cm x 54.6 cm) Weight: 132 lbs. (60 kg) Cooling: Water: 1.5 GPM (5.7 liters) Certification: ETL Marked, Semi F47OEM Model Description
RF GeneratorDocuments
No documents
Similar Listings
View All
COMDEL
CX-2500
CATEGORY
Power Supplies
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled / Uncrated
Product ID:
126886
Wafer Sizes:
Unknown
Vintage:
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Comdel CX-2500/6.78 MHz 2500 W RF Generator, PN: FP3368R1 Description: The CX-2500 power supply has a power range of 2500 Watts with a fixed frequency of 6.78 MHz. The solid-state design provides low cost of ownership with high reliability. Applications: The CX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.Configuration
The Unit's Serial Number Tag Reads: Model Number: CX-2500/6.78 Serial Number: 091 Part Number: FP3368R1 Date of Manufacturing: 10/29/99 Specifications: Power Output: 2500 W Harmonic Distortion: Less than -30 dBc Power Requirements: 190-225 VAC; Three Phase; 50/60 Hz / 15 A typical Control I/O Connector: 25-pin subiminiature D type Std. Output Connector: Type-N Power Control: 0-10 VDC input for 0 to maximum-rated output Power Control Linearity: ≤ 2% of setting at power levels above 10% of rated power Frequency: Fixed Frequency of 6.78 MHz Dimensions: 7" H x 19" W x 21.5" D (17.8 cm x 48.3 cm x 54.6 cm) Weight: 132 lbs. (60 kg) Cooling: Water: 1.5 GPM (5.7 liters) Certification: ETL Marked, Semi F47OEM Model Description
RF GeneratorDocuments
No documents