Skip to main content
Moov logo

Moov Icon
TEL / TOKYO ELECTRON UNITY ME
    Have one like this?Sell it with Moov
    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:75364

    Wafer Sizes:8"/200mm

    Vintage:2001

    Description

    No description available

    Configuration

    Unity ME 8555sss with 3 SCCM Oxide chambers Process: Oxide

    Documents
    OEM Model Description

    UNITY™ Me is a cost effective dry etch system for 100/150/200mm wafer diameter, which has been attracting attention in recent years again as a highly efficient system and is still sold as a new product. There are rich variety of special chamber specifications, such as SCCM™, DRM for SiO2/SiN etch and UD chamber for Si/SiC trench etch. TEL offers a wide range of etch applications to the customer through closely collaboration in process demonstration using internal evaluation tools. Unity ME was originally made in Mass. But moved to Japan, supported 3 chambers and an ash or other small unit. Originally 200mm, some were converted to 300mm. TEL now manufactures this system again for 100-300mm.

    Available Services

    Moov goes beyond the transaction to ensure a seamless buying experience from start to finish.

    • Money Back Guarantee

      Now free!

      Let Moov take the risk out of purchasing secondhand equipment with our 'No questions asked Money Back Guarantee' Learn more

    • Logistics

      One stop shop for Moov-ing equipment anywhere globally.

    • Insurance

      Moov-ing equipment can be risky. Let us take on that risk so you can relax while your equipment is in transit.

    • Refurbishment

      Need a tool built to the required specifications? Moov's refurbishment team has over 20 years of experience.

    Similar Listings