Description
Hitachi High-Technologies M602A Dry EtcherConfiguration
2 Etch, 2 strip LD: 2ea, Fortrend Punp: 6ea, 4+2, Ebara, AA40W, AA10 Metal EtchOEM Model Description
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HITACHI
M 602A
Verified
CATEGORY
Plasma Etch
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
93148
Wafer Sizes:
Unknown
Vintage:
1997
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Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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View AllHITACHI
M 602A
Verified
CATEGORY
Plasma Etch
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
93148
Wafer Sizes:
Unknown
Vintage:
1997
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Hitachi High-Technologies M602A Dry EtcherConfiguration
2 Etch, 2 strip LD: 2ea, Fortrend Punp: 6ea, 4+2, Ebara, AA40W, AA10 Metal EtchOEM Model Description
None ProvidedDocuments
No documents