Description

De-installed Equipment usage and function description 12-inch wafer plasma reaction chambers Missing parts No

Configuration

Item Configuration Chamber DPSII RF System Bias generator V Source generator V bias match V HV module V Vacuum system Turbo pump V ISO valve V Pumping Line V Dual Gas feed system Gas line V ISO valve V EPD system Eye-D controller X Electric system AC distribute V DC power supply V Other Heater pad & ring V Source inner coil V Swap kits (9 pcs) V

OEM Model Description

None Provided

Documents

AMAT DSP II.pdf

APPLIED MATERIALS (AMAT)

DPS II AE

Verified

Dry / Plasma Etch

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Deinstalled

Product ID:

109727

Wafer Sizes:

12"/300mm

Vintage:

2007

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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