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OXFORD PLASMAPRO 100 PECVD

Description

the pc can be power on, but chamber is already vacuum packed

Configuration

OXFORD PlasmaPro 100 PECVD System Deposition lower electrode kit ADVANCED ENERGY / DRESSLER RF 600W Generator AMU Match INFICON 5T CM Gauge kit ALCATEL / ADIXEN / PFEIFFER A604H Pump kit Pump cable, 10 m Isolation valve ALCATEL / ADIXEN / PFEIFFER ACP 15D Dry pump kit Single wafer load lock kit Gas pod (8) Gas lines Gases: SIH4, NH3, GN2, CF4, N2O Mass Flow Controller (MFC) PC Monitor, 19" Power supply: 400 V, 3 Phase, 50 Hz 2018 vintage.

OEM Model Description

The PECVD process modules are specifically designed to produce excellent uniformity and high rate films, with control of film properties such as refractive index, stress, electrical characteristics and wet chemical etch rate.

Documents

No documents

OXFORD

PLASMAPRO 100 PECVD

verified-listing-icon

Verified

CATEGORY

PECVD

Last Verified: Over 30 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

139842

Wafer Sizes:

Unknown

Vintage:

2018

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Similar Listings

OXFORD PLASMAPRO 100 PECVD

OXFORD

PLASMAPRO 100 PECVD

Vintage: 2018Condition: Used

Last VerifiedOver 30 days ago

OXFORD PLASMAPRO 100 PECVD

OXFORD

PLASMAPRO 100 PECVD

Vintage: 2018Condition: Used

Last VerifiedOver 60 days ago

OXFORD

PLASMAPRO 100 PECVD

verified-listing-icon

Verified

CATEGORY

PECVD

Last Verified: Over 30 days ago

listing-photo-bac14281796f4348b118c8dcc58d9999-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/44573/bac14281796f4348b118c8dcc58d9999/f6e62fcee7394bf1b8692dcc1248b63d_51926fbb2f474c83847ebc911e0621e3_mw.jpeg

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

139842

Wafer Sizes:

Unknown

Vintage:

2018

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

the pc can be power on, but chamber is already vacuum packed

Configuration

OXFORD PlasmaPro 100 PECVD System Deposition lower electrode kit ADVANCED ENERGY / DRESSLER RF 600W Generator AMU Match INFICON 5T CM Gauge kit ALCATEL / ADIXEN / PFEIFFER A604H Pump kit Pump cable, 10 m Isolation valve ALCATEL / ADIXEN / PFEIFFER ACP 15D Dry pump kit Single wafer load lock kit Gas pod (8) Gas lines Gases: SIH4, NH3, GN2, CF4, N2O Mass Flow Controller (MFC) PC Monitor, 19" Power supply: 400 V, 3 Phase, 50 Hz 2018 vintage.

OEM Model Description

The PECVD process modules are specifically designed to produce excellent uniformity and high rate films, with control of film properties such as refractive index, stress, electrical characteristics and wet chemical etch rate.

Documents

No documents

Similar Listings

OXFORD PLASMAPRO 100 PECVD

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