Lam Research is a leading supplier of plasma etch- and single-wafer clean equipment that plays a pivotal role in defining the features and capabilities of next-generation semiconductor devices. With the addition of Novellus' innovative thin-film deposition and surface preparation product lines, the new Lam Research is well-positioned within the industry to support critical technology transitions including 3D structures in advanced logic and NAND memory, as well as the scaling to 450 mm wafers.

LAM RESEARCH / NOVELLUS

Novellus VECTOR Express is an improvement to Novellus’ 300 mm VECTOR plasma-enhanced chemical vapor deposition (PECVD) platform that was introduced in 2007. It maintains industry-leading capital and footprint productivity by improving process throughput by up to 40%, while delivering benchmark thin film process performance that is critical to tool extendibility to 45 nm and beyond.

The SmartSoak processing feature is incorporated in VECTOR Express which utilizes the multi-station sequential processing (MSSP) architecture of VECTOR to control wafer heat-up independently from film deposition, improving film quality and reducing processing time .

VECTOR Express is also available in an ashable hard mask configuration (VECTOR Express AHM), designed to deposit films for the high aspect ratio patterning requirements required by 193 nm lithography.

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

PECVD

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LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

VECTOR EXPRESS

PECVD

Similar Listings

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS

LAM RESEARCH / NOVELLUS

VECTOR EXPRESS