
Description
Applied Materials 5000 ASP Process Chamber, 100mm chuck, lift hoop (fingers missing), wave guide w/ 3-stub manual tuner, applicator tube, 1500W magnetron p/n 0190-09769, lamp module p/n 0010-09911, chamber interface board, dual baratrons manifold & display board (manometers missing), plasma applicator, lift assembly w/ TC amplifier box & over-temp interlock box, throttle valve p/n 0010-09174, isolation valve (KF50), water flow switch, chamber harness p/n 0140-09465, plasma tube cooling solenoid, pre-fire power supply box.Configuration
No ConfigurationOEM Model Description
PROCESS CHAMBER BODYDocuments
No documents
Verified
CATEGORY
Parts
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
113342
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
5000 ASP
CATEGORY
Parts
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
113342
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Applied Materials 5000 ASP Process Chamber, 100mm chuck, lift hoop (fingers missing), wave guide w/ 3-stub manual tuner, applicator tube, 1500W magnetron p/n 0190-09769, lamp module p/n 0010-09911, chamber interface board, dual baratrons manifold & display board (manometers missing), plasma applicator, lift assembly w/ TC amplifier box & over-temp interlock box, throttle valve p/n 0010-09174, isolation valve (KF50), water flow switch, chamber harness p/n 0140-09465, plasma tube cooling solenoid, pre-fire power supply box.Configuration
No ConfigurationOEM Model Description
PROCESS CHAMBER BODYDocuments
No documents