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KLA ATL150i
    Description
    Overlay Measurement System
    Configuration
    Archer TL150i main attributes / components - • Archer TL150i is a high-performance overlay metrology tool for advanced technology nodes, enabling OPO requirements below 2.5nm. Its unique pupil-based scatterometry configuration, combined with full spectrum wave tuning capability, enables customized selection of working wavelength and bandwidth per layer. This results in optimized performance for the most accurate and robust measurement. Archer TL150i is equipped with an ultra-high brightness super-continuum laser, providing high speed scanning of the overlay cell, and a small spot for minimizing cell-edge effects. It is also equipped with an ADS (active damping system) enhanced stage, allowing faster motion and reduced measurement noise. Combined with new advanced algorithms that use multiple signals to improve measurement accuracy, Archer TL150i provides best in class overlay results.
    OEM Model Description
    None Provided
    Documents

    No documents

    verified-listing-icon

    Verified

    CATEGORY
    Overlay

    Last Verified: 3 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    155068


    Wafer Sizes:

    12"/300mm


    Vintage:

    Unknown


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    KLA ATL150i

    KLA

    ATL150i

    Overlay
    Vintage: 0Condition: Used
    Last Verified3 days ago

    KLA

    ATL150i

    verified-listing-icon
    Verified
    CATEGORY
    Overlay
    Last Verified: 3 days ago
    listing-photo-b10e08c327244c8f8b4afb4ac6c2a44c-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    155068


    Wafer Sizes:

    12"/300mm


    Vintage:

    Unknown


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Overlay Measurement System
    Configuration
    Archer TL150i main attributes / components - • Archer TL150i is a high-performance overlay metrology tool for advanced technology nodes, enabling OPO requirements below 2.5nm. Its unique pupil-based scatterometry configuration, combined with full spectrum wave tuning capability, enables customized selection of working wavelength and bandwidth per layer. This results in optimized performance for the most accurate and robust measurement. Archer TL150i is equipped with an ultra-high brightness super-continuum laser, providing high speed scanning of the overlay cell, and a small spot for minimizing cell-edge effects. It is also equipped with an ADS (active damping system) enhanced stage, allowing faster motion and reduced measurement noise. Combined with new advanced algorithms that use multiple signals to improve measurement accuracy, Archer TL150i provides best in class overlay results.
    OEM Model Description
    None Provided
    Documents

    No documents

    Similar Listings
    View All
    KLA ATL150i

    KLA

    ATL150i

    OverlayVintage: 0Condition: UsedLast Verified:3 days ago