
Description
Overlay Measurement SystemConfiguration
Archer TL150i main attributes / components - • Archer TL150i is a high-performance overlay metrology tool for advanced technology nodes, enabling OPO requirements below 2.5nm. Its unique pupil-based scatterometry configuration, combined with full spectrum wave tuning capability, enables customized selection of working wavelength and bandwidth per layer. This results in optimized performance for the most accurate and robust measurement. Archer TL150i is equipped with an ultra-high brightness super-continuum laser, providing high speed scanning of the overlay cell, and a small spot for minimizing cell-edge effects. It is also equipped with an ADS (active damping system) enhanced stage, allowing faster motion and reduced measurement noise. Combined with new advanced algorithms that use multiple signals to improve measurement accuracy, Archer TL150i provides best in class overlay results.OEM Model Description
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KLA
ATL150i
CATEGORY
Overlay
Last Verified: 3 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
155068
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Overlay Measurement SystemConfiguration
Archer TL150i main attributes / components - • Archer TL150i is a high-performance overlay metrology tool for advanced technology nodes, enabling OPO requirements below 2.5nm. Its unique pupil-based scatterometry configuration, combined with full spectrum wave tuning capability, enables customized selection of working wavelength and bandwidth per layer. This results in optimized performance for the most accurate and robust measurement. Archer TL150i is equipped with an ultra-high brightness super-continuum laser, providing high speed scanning of the overlay cell, and a small spot for minimizing cell-edge effects. It is also equipped with an ADS (active damping system) enhanced stage, allowing faster motion and reduced measurement noise. Combined with new advanced algorithms that use multiple signals to improve measurement accuracy, Archer TL150i provides best in class overlay results.OEM Model Description
None ProvidedDocuments
No documents