Description
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OverlayOEM Model Description
Archer 10 is an Automated Optical Overlay Metrology product that provides control of overlay error budget for sub-0.13-micron production, increases throughput by 30%, and allows consistent measurement of low-contrast targets. It integrates with KLA-Tencor’s software management products to provide comprehensive optical overlay metrology process control.Documents
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KLA
ARCHER 10
CATEGORY
Overlay
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
137348
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
OverlayOEM Model Description
Archer 10 is an Automated Optical Overlay Metrology product that provides control of overlay error budget for sub-0.13-micron production, increases throughput by 30%, and allows consistent measurement of low-contrast targets. It integrates with KLA-Tencor’s software management products to provide comprehensive optical overlay metrology process control.Documents
No documents