VEECO

K475

MOCVD Reactor

GloveBox
Carrier Door Status: Working and complete
GB Glove Status: Working and complete
LL pump(ACP) 2 ea Status: Working and complete
Genmark Status: Working and complete
Ebara pump (process pump): Not included

Reactor Cart
RT 2ea Status: Working and complete (3 for each)
DRT 1ea Status: Working and complete
Circulation pump Status: Working and complete
Ferro Motor Status: Working and complete

Transfer Hub
Ion gauge Status: Working and complete
Convection Status: Working and complete
Baratron Status: Working and complete
Turbo pump Status: Working and complete

E Rack
Main Breaker Status: Working and complete
MC contactor Status: Working and complete

SDA 
LAUDA bath number: 7 for each (Status: Working and complete)
Eurotherm 3ea (Status: Working and complete)
NEXUS PC Status: Working and complete
Insitu PC Status: Working and complete
SQL PC Status: Working and complete
Main PCB Status: Working and complete
Dnet scanner Status: Working and complete
Dnet scanner PS Status: Working and complete

　

K475.pdf

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