Description
GaN Epitaxy 6"/8" Bridge tool Min. surface needed: 7113mm x 3665mm including maintenance areaConfiguration
Maximum ventilation limit a. N2 b. H2 300slm c. NH3 100 slm d. Space e. SiH4 / H2 ≤ 2% 5slm f. Space g. C2H4 5 slm h. Cl2 3slm i. N2 tech j. Ar Cooling System drawing à Continuous flow of cooling water required, the installation of an emergency cooling circuit is strongly recommended. Operating pressure inside system: max. 6bargOEM Model Description
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AIXTRON
AIX G5+
CATEGORY
MOCVD
Last Verified: 13 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
146871
Wafer Sizes:
6"/150mm, 8"/200mm
Vintage:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
GaN Epitaxy 6"/8" Bridge tool Min. surface needed: 7113mm x 3665mm including maintenance areaConfiguration
Maximum ventilation limit a. N2 b. H2 300slm c. NH3 100 slm d. Space e. SiH4 / H2 ≤ 2% 5slm f. Space g. C2H4 5 slm h. Cl2 3slm i. N2 tech j. Ar Cooling System drawing à Continuous flow of cooling water required, the installation of an emergency cooling circuit is strongly recommended. Operating pressure inside system: max. 6bargOEM Model Description
None ProvidedDocuments
No documents