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WYKO / VEECO SP 3200
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    WYKO / VEECO

    SP 3200

    Category
    Metrology

    Created: March 1, 2019

    Verified

    Last Verified: Over 60 days ago

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    Key Item Details

    Condition: As Is

    Product ID: 21924

    Wafer Sizes:

    Vintage: Unknown

    Description

    No description available

    Configuration

    Veeco Bruker Wyko SP9900 Large Format Optical Surface Profiler. Automated non-contact 3D critical dimension measurements. Large format surface profiling system delivers unmatched measurement performance on substrate panels, bumped substrates, flat panels and circuit boards for improved process monitoring and increased yields. High resolution imaging and patented vertical scanning interferometry system can perform accurate 3D critical dimension measurements with nanometer resolution. Powerful surface metrology instrument and defect inspection tool. Measurement Capability: Non-contact, three dimensional, surface, critical dimension, film thickness, tribology. Vertical Measurement Range: 0.1nm to 10mm. Vertical Resolution: Less than 0.1nm. RMS Repeatability: 0.01nm. No Cognex system. 115/230V, 1 Ph, 50/60 Hz, CE. Mfg.: 2008.

    OEM Model Description

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    Other Information
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