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QUANTOX
Category
MetrologyOverview
Quantox® is a metrology system designed to measure the electrical performance of gate dielectric films in integrated circuits. The quality of the gate dielectric is crucial for the speed and reliability of the circuit. By measuring key parameters such as contamination levels and oxide thickness, Quantox® helps to control the gate dielectric process and maximize device yield. The system is non-contact, ensuring accurate and reliable measurements.
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