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SpectraShape 8660
Category
MetrologyOverview
The SpectraShape 8660 and 8810 optical CD and shape metrology systems. The new SpectraShape systems fully characterize and monitor the critical dimensions and three-dimensional shapes of geometrically complex features incorporated by some IC manufacturers in their latest generation devices.
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KLA
SpectraShape 8660
MetrologyVintage: Condition: UsedLast VerifiedOver 30 days agoKLA
SpectraShape 8660
MetrologyVintage: Condition: UsedLast VerifiedOver 30 days agoKLA
SpectraShape 8660
MetrologyVintage: Condition: UsedLast VerifiedOver 30 days agoKLA
SpectraShape 8660
MetrologyVintage: 2012Condition: UsedLast VerifiedOver 60 days ago
