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KLA RS100
    Description
    Omnimap Resistivity Mapping System
    Configuration
    No Configuration
    OEM Model Description
    The RS-100 is a production-worthy resistivity measurement system used in nearly all fabs worldwide. It provides advanced automation and improved edge performance for 300mm wafers. It has accurate and repeatable resistivity measurements up to 1mm from the conductive film edge, patented temperature compensation, and easy-to-use software. It is used in metal deposition, CMP, ion implantation, and diffusion. Its enhanced edge performance provides greater insight into process control variance and lowers cost-of-ownership.
    Documents

    No documents

    KLA

    RS100

    verified-listing-icon

    Verified

    CATEGORY

    Metrology
    Last Verified: Over 60 days ago
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    82527

    Wafer Sizes:

    Unknown

    Vintage:

    2000

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
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    Refurbishment Services
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    verified-listing-icon

    Verified

    CATEGORY

    Metrology
    Last Verified: Over 60 days ago
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    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    82527

    Wafer Sizes:

    Unknown

    Vintage:

    2000

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Omnimap Resistivity Mapping System
    Configuration
    No Configuration
    OEM Model Description
    The RS-100 is a production-worthy resistivity measurement system used in nearly all fabs worldwide. It provides advanced automation and improved edge performance for 300mm wafers. It has accurate and repeatable resistivity measurements up to 1mm from the conductive film edge, patented temperature compensation, and easy-to-use software. It is used in metal deposition, CMP, ion implantation, and diffusion. Its enhanced edge performance provides greater insight into process control variance and lowers cost-of-ownership.
    Documents

    No documents

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    View All
    KLA RS100
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    MetrologyVintage: 2000Condition: UsedLast Verified: Over 60 days ago