
Description
Missing Parts: Robot controller, cathode power supply, filament power supply, monitor, RP3, ion gauge controller (cable), L/R side cup BNC cable, source filament power supplyConfiguration
Accessories: Decontamination system (shared with IG103), Process gases: Ar, PH3, AsH3, BF3OEM Model Description
None ProvidedDocuments
No documents
CATEGORY
Medium Current
Last Verified: 14 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
143531
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SEN CORPORATION / SUMITOMO
MC3-II/CM
CATEGORY
Medium Current
Last Verified: 14 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
143531
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Missing Parts: Robot controller, cathode power supply, filament power supply, monitor, RP3, ion gauge controller (cable), L/R side cup BNC cable, source filament power supplyConfiguration
Accessories: Decontamination system (shared with IG103), Process gases: Ar, PH3, AsH3, BF3OEM Model Description
None ProvidedDocuments
No documents