In 2000, Eaton spun off Axcelis as a separate company, and Axcelis inherited Eaton’s 50-percent ownership stake in the joint venture. SEN, licenses technology from Axcelis for ion implantation, has exclusive rights to the territory of Japan and is the leading producer of ion implantation equipment in Japan. In 2009, the merger between Axcelis Technologies and Sumitomo Heavy Industries dissolved—Sumitomo became the sole parent company, and with this, the company name changed to SEN Corporation.

SEN CORPORATION / SUMITOMO

200mm high tilt and medium current applications for all chips.

SEN CORPORATION / SUMITOMO

NV 8250HT

Medium Current

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NV 8250HT

Medium Current

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