Description
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Kloé UV-KUB 3, 6-inch mask aligner. 365 nm UV-LED exposure source, 35 mW/cm². Accepts substrates up to 6” and photomasks up to 7”. Resolution 1 µm with 1 µm alignment accuracy. Dual CCD camera alignment system, touchscreen interface, USB control joypad and embedded PC with automatic pre-alignment and alignment-mark storage. XYZ/θ motorised substrate positioning. Compatible with standard photoresists including AZ, Shipley and SU-8. Compact standalone system.OEM Model Description
The mask aligner UV-KUB 3 is the first mask alignment system equipped with a UV-LED light source, that provide an unrivalled collimation and homogeneous exposure, on the international market. Compact, easy to use and efficient, the mask alignment system UV-KUB 3 allows alignment up to 7" photolithography mask with substrates up to 6" in a cube volume of 48cm size.Documents
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
153121
Wafer Sizes:
6"/150mm
HDD / Software:
Yes
Exposure:
Contact / proximity UV photolithography using collimated UV-LED exposure
Alignment:
CCD camera video alignment with motorised XYZ/θ positioning, joystick control and automatic pre-alignment
Light Source:
365 nm UV LED, 35 mW/cm², monochromatic collimated source
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLOE
UV-KUB 3
CATEGORY
Mask/Bond Aligners
Last Verified: 5 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
153121
Wafer Sizes:
6"/150mm
HDD / Software:
Yes
Exposure:
Contact / proximity UV photolithography using collimated UV-LED exposure
Alignment:
CCD camera video alignment with motorised XYZ/θ positioning, joystick control and automatic pre-alignment
Light Source:
365 nm UV LED, 35 mW/cm², monochromatic collimated source
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available