Description

Horizontal furnaces, GIGA TECH cleaning machines, and BAKE are excluded.

Configuration

No Configuration

OEM Model Description

The Canon MPA-600Super is a 1:1 mirror projection mask aligner that features improved overlay accuracy for mass production of VLSI devices. It was developed based on the MPA-600FA and MPA-500FAb and achieves better yield, higher throughput, and improved stability. It can handle wafer sizes ranging from 4 to 6 inches and mask sizes from 5 to 7 inches.