The TP-500 is a Therma-Probe product that uses a laser-based, nondestructive measurement technique for monitoring ion implantation. It provides improved product reliability by employing the modernized and field-proven platform of the Therma-Wave Opti-Probe 2600, and added pattern recognition and improved wafer throughput.

KLA-Tencor Corporation announced it has completed its acquisition of Therma-Wave Corporation.
Therma-Wave develops, manufactures, and sells process control metrology systems used in the manufacture of semiconductors.

TP-500

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