KLA-Tencor Corp. announced it has completed its acquisition of ADE Corp., a supplier of silicon wafer metrology and related gear.

KLA / ADE

AWIS 3110

INM100+INS10

The Constellation is a fully automated inspection tool designed to handle the needs of both 200mm and 300mm polished and epi wafer inspection. Constellation offers advanced inspection capabilities for high volume 200 mm production, while offering simple, software-driven conversions to handle 300 mm pilot and production requirements.

CONSTELLATION

The AWIS-300 series systems, currently in the final stages of development, are based on ADE's proprietary ARS (Angle Resolved Scatter) technologies for the optical inspection of bare and film wafer surfaces, and are intended for use in a class 1 or better cleanroom environment. The AWIS-300 is designed to provide the combination of front and backside measurement, sensitivity, throughput and sorting capabilities required by wafer manufacturers.

KLA / ADE

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Top KLA / ADE Mask Inspection

INM100+INS10

AWIS 3110

AWIS-300

CONSTELLATION

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