200mm production mask aligner cassette-to-cassette with high throughput of up to 170 wafers/hour in first mask mode.

SUSS MicroTec offers a wide product portfolio of high quality process solutions for the semiconductor industry and related markets. SUSS portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding, and photomask processing, complemented by micro-optical components. 

SUSS MicroTec / KARL SUSS

MA200E

SUSS MASK ALIGNER MA200 E   Windows based with  Suss AL / Autoalign System
Alignment System MA200E TSA
PC -Aut. Adjustment ( Cognex Patmex ) TSA
Lamphouse unit LH 1500
Suss DVM 8 dual video Microscope ( 2CCD – Cameras /set of rotating Objectives L+R )
2 Objective  5x
2  Objective  10x
2 Objective  20X
Transport Plates ( Kit MA200 / W100-200/Even
Exposure Chuck Prox/Cont W200
Maskholder MA 200/TL/Prox/Cont/W200
CIC1200 Lamp Powersupply
Set of Exposure optics Typ A / UV400
Non Contact Prealigner Station with IR – Sensor
Operators Manual MA 200E English (Digi.)
Optional: Suss Lightintensity Meter incl. Probe 405NM

MA200E OEM Brochure.pdf

MA200E Config.pdf

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MA200E

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