The SVG / PERKIN ELMER / ASML Micralign 761HT is a projection mask alignment system.  The key to the design was a 16-element lens system that produced an extremely focused light source. The resulting system could produce 2.5 μm features. The Micralign improved the yield of operational ICs from an average of 10% to over 50%, and as great as 70% in many applications.

SVG acquiring the old Perkin Elmer Micrascan operation in the late 1980s. Silicon Valley Group, Inc. stockholders approve merger with ASM Lithography Holding NV.

SVG is a leading supplier of wafer processing equipment for the worldwide semiconductor industry. The company designs, manufactures and markets technically sophisticated equipment used in the primary stages of semiconductor manufacturing. Its products include: photoresist processing equipment; oxidation, diffusion and low-pressure chemical vapor deposition processing systems; atmospheric pressure chemical vapor deposition systems; lithography exposure tools that use step-and-scan technology; and precision optical components and systems.



MICRALIGN 761 HT

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