The Model 220 UV-3 includes the optical performance features of the Model 210 UV-3 plus automatic 3 inch wafer loading capability. The automatic wafer loading system is available for cassette load or optional thru-track operation.

SVG acquiring the old Perkin Elmer Micrascan operation in the late 1980s. Silicon Valley Group, Inc. stockholders approve merger with ASM Lithography Holding NV.

SVG is a leading supplier of wafer processing equipment for the worldwide semiconductor industry. The company designs, manufactures and markets technically sophisticated equipment used in the primary stages of semiconductor manufacturing. Its products include: photoresist processing equipment; oxidation, diffusion and low-pressure chemical vapor deposition processing systems; atmospheric pressure chemical vapor deposition systems; lithography exposure tools that use step-and-scan technology; and precision optical components and systems.



MICRALIGN 220 UV-3

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