Used RAITH e-LiNE Equipment | Moov

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Marketplace > Lithography > RAITH > e-LiNE

e-LiNE

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Overview

he Raith e-LiNE is an electron beam lithography tool which utilizes thermal field emission filament technology and a laser-interferometer controlled stage. The system is equipped with a load lock, an automatic height laser sensor, and both In-lens and SE2 detectors.

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