Description
High voltage: 50KV Mask type: 6025 standard mask Resolution: 200nm Loding type: SMIF loadConfiguration
EBM3500 E-beam lithography includes: EBM 3500 covers I/O Arm RMS EHV cabinet ALC cabinet ACP cabinet VAL cabinet EOC cabinet DPW cabinet MAC cabinet PDF cabinet PRX cabinet PCU1 TRU CHL EWS Dry pump*3+ Orion*1 Exhaust cover*6 SUB, AMP box*8 Cables & ETCOEM Model Description
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NUFLARE
EBM-3500
CATEGORY
Lithography
Last Verified: 19 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
142587
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
High voltage: 50KV Mask type: 6025 standard mask Resolution: 200nm Loding type: SMIF loadConfiguration
EBM3500 E-beam lithography includes: EBM 3500 covers I/O Arm RMS EHV cabinet ALC cabinet ACP cabinet VAL cabinet EOC cabinet DPW cabinet MAC cabinet PDF cabinet PRX cabinet PCU1 TRU CHL EWS Dry pump*3+ Orion*1 Exhaust cover*6 SUB, AMP box*8 Cables & ETCOEM Model Description
None ProvidedDocuments
No documents