Overview

FPD Steppers Resolution: ≦ 1.5 µm (L/S), ≦ 2.0 µm (C/H) Projection magnification: 1:1 Exposure field: 100 mm square to 74.83 x 120 mm (≦ ø141.42 mm) Reticle size: 6-in. (0.25-in. thickness) Maximum plate size: 600 (X) × 720 (Y) mm Overlay: ≦ 0.32 µm (8-point + EGA, |M| + 3σ) Options: Pellicle particle detector, extended reticle library, reticle bar code reader, remote control system (RCS)