Description
Maskless exposure systemConfiguration
Automated substrate handling for low-volume manufacturing High-precision stage with contactless wedge-error compensation Self-calibration through integrated sensors Expandable to two exposure heads Separate control unit EVG CIM Framework software Automatic initialization and startup diagnostics PC-controlled operation Solid-state drive and hard drive Supported layout format: GDSIIOEM Model Description
LITHOSCALE is a revolutionary, highly versatile maskless exposure lithography platform geared for a variety of microfabrication applications accommodating wafers up to 300 mm.Documents
No documents
Verified
CATEGORY
Lithography
Last Verified: 20 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
131095
Wafer Sizes:
Unknown
Vintage:
2023
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
EVGROUP (EVG)
LITHOSCALE
CATEGORY
Lithography
Last Verified: 20 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
131095
Wafer Sizes:
Unknown
Vintage:
2023
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Maskless exposure systemConfiguration
Automated substrate handling for low-volume manufacturing High-precision stage with contactless wedge-error compensation Self-calibration through integrated sensors Expandable to two exposure heads Separate control unit EVG CIM Framework software Automatic initialization and startup diagnostics PC-controlled operation Solid-state drive and hard drive Supported layout format: GDSIIOEM Model Description
LITHOSCALE is a revolutionary, highly versatile maskless exposure lithography platform geared for a variety of microfabrication applications accommodating wafers up to 300 mm.Documents
No documents