Description
No descriptionConfiguration
Accelaration voltage: 50 kV Field size: 1600 μm x800 μm Beam current: 3.5 μA Beam size: 4 μm x4 μm variable shaped beam Scanning speed: 8 MHz Stitching accuracy: 45 nm Overlay accuracy: 45 nm Substrate size: 3 inchOEM Model Description
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ADVANTEST
F5112
CATEGORY
Lithography
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
134374
Wafer Sizes:
Unknown
Vintage:
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Accelaration voltage: 50 kV Field size: 1600 μm x800 μm Beam current: 3.5 μA Beam size: 4 μm x4 μm variable shaped beam Scanning speed: 8 MHz Stitching accuracy: 45 nm Overlay accuracy: 45 nm Substrate size: 3 inchOEM Model Description
None ProvidedDocuments
No documents