INFICON

UL200

UL1000

Transpector XPR3 is the next generation in highpressure, quadrupole-based process gas analysis. It builds on the success of previous INFICON systems to allow monitoring of physical vapor deposition (PVD) processes with unprecedented sensitivity, accuracy and flexibility. A series of technological breakthroughs allow the compact Transpector XPR3 to operate from 20 mTorr to ultrahigh vacuum without the need for large, complex pressure conversion equipment.

TRANSPECTOR XPR3

The Transpector® Gas Analysis System is an RGA that provides accurate and reliable data for vacuum process monitoring, process diagnostics, and leak detection in semiconductor manufacturing. In the Transpector 2, increased hydrogen sensitivity makes contaminants visible at sub-ppm levels, and four times faster scanning over low level signals with an expanded dynamic range provides cleaner data at lower detectable partial pressures.

TRANSPECTOR 2

PERNICKA 700H

Protec P3000(XL) 

CPM100

UL5000

CONTURA S400

The Protec P3000(XL) leak detector brings increased levels of productivity and reliability to the sub-assembly and mid-production testing of refrigerators, freezers, air conditioners automotive air conditioners, RAC components and similar products. Numerous features make it easy and comfortable to use, while making it immune to careless or untrained operation. It is also fast to make the best use of your available cycle time.

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Top INFICON Leak Detection / Gas Analyzer

UL200

UL1000

TRANSPECTOR XPR3

Protec P3000(XL)

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