Description
Soft laser marking systemConfiguration
Known issues: Laser output measured 1.69 W at current 120 and pulsewidth 195; report specifies output should exceed 2.4 W and recommends diode / flowcell replacement (both used over 3.5 years) CE calibration cannot be written normally; LPC replacement recommended X / Y galvos do not move during manual jobs, causing marking at the same point on the wafer; ME2 marker driver control board replacement recommended Aligner repeatability could not be tested due to abnormal marker operation Handling: Crossing Automation Model 21 robot, P/N 12000-057, software 1.5D Edge-grip handling Quartet Mechanics EGPB edge-grip aligner with buffer, replacing Asyst aligner (Qty 2) Asyst load ports without OHT Software: WLM version 3.4.1 Application / Control version 3.4.15.0 Electrical: 220 VAC, 22 A, 50-60 HzOEM Model Description
Automated, laser-based wafer marking and tracking systemDocuments
No documents
CATEGORY
Laser
Last Verified: 9 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
154572
Wafer Sizes:
12"/300mm
Vintage:
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
GSI LUMONICS
WaferMark SigmaClean 300 (WMSC300)
CATEGORY
Laser
Last Verified: 9 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
154572
Wafer Sizes:
12"/300mm
Vintage:
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Soft laser marking systemConfiguration
Known issues: Laser output measured 1.69 W at current 120 and pulsewidth 195; report specifies output should exceed 2.4 W and recommends diode / flowcell replacement (both used over 3.5 years) CE calibration cannot be written normally; LPC replacement recommended X / Y galvos do not move during manual jobs, causing marking at the same point on the wafer; ME2 marker driver control board replacement recommended Aligner repeatability could not be tested due to abnormal marker operation Handling: Crossing Automation Model 21 robot, P/N 12000-057, software 1.5D Edge-grip handling Quartet Mechanics EGPB edge-grip aligner with buffer, replacing Asyst aligner (Qty 2) Asyst load ports without OHT Software: WLM version 3.4.1 Application / Control version 3.4.15.0 Electrical: 220 VAC, 22 A, 50-60 HzOEM Model Description
Automated, laser-based wafer marking and tracking systemDocuments
No documents