
Description
Laser SystemConfiguration
No ConfigurationOEM Model Description
ELS‐4000 is designed and engineered to perform at 400 Hz and 4 W with a narrower spectral bandwidth (2 pm) and a wavelength stability of better than ±0.25 pm. In addition, the pulse‐to‐pulse stability has been improved in stepper‐mode operation. The ELS‐4000 also employs a new microprocessor controlled gas injection system that permits uninterrupted operation for 10–20 h (7–10 million pulses).Documents
No documents
Verified
CATEGORY
Laser
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
21079
Wafer Sizes:
Unknown
Vintage:
1993
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASML / CYMER
ELS-4000
CATEGORY
Laser
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
21079
Wafer Sizes:
Unknown
Vintage:
1993
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Laser SystemConfiguration
No ConfigurationOEM Model Description
ELS‐4000 is designed and engineered to perform at 400 Hz and 4 W with a narrower spectral bandwidth (2 pm) and a wavelength stability of better than ±0.25 pm. In addition, the pulse‐to‐pulse stability has been improved in stepper‐mode operation. The ELS‐4000 also employs a new microprocessor controlled gas injection system that permits uninterrupted operation for 10–20 h (7–10 million pulses).Documents
No documents