Category
Metrology
Last Verified:Over 60 days ago
Category
Metrology
Last Verified:Over 60 days ago
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Key Item Details
Condition:Used
Operational Status:
Product ID:57796
Wafer Sizes:Unknown
Vintage:Unknown
Description
Dielectric Characterization Tool with COCOS & Epi-t for up to 300mm Wafers, Parts Only
Configuration
No Configuration
Documents
OEM Model Description
The SEMILAB FAaST 330 is an electrical metrology system that uses non-contact methods to measure the properties of materials. It combines two patented techniques, known as Micro and Macro corona-Kelvin methods, into one platform. This system is designed to support both advanced research and development and high-volume manufacturing environments. The FAaST 330/230 DSPV systems provide fast, non-contact monitoring of heavy metal contamination in wafers, with the ability to detect even very low levels of contamination. The FAaST 330/230 C-V / I-V systems use advanced measurement techniques to provide non-contact imaging of dielectric and interface properties on monitor wafers. These systems include automated wafer handling and are suitable for medium to high-volume manufacturing environments.
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