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SEMILAB FAAST 330
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:24311

    Wafer Sizes:12"/300mm

    Vintage:1999

    Description

    No description available

    Configuration

    COCOS, SILC & EPI-t Test Capabilities For Analyzing 200mm & 300mm Wafers 300mm (dia.) Anodized Aluminum Hot Chuck 300mm (dia.) Gold Plated Measurement Chuck PRI ATM 407-1-S Wafer Handling Robot PRI ESC-212B Robot Controller EQUIPE TECHNOLOGIES PRE -4281 Wafer Prealigner 2ea NEWPORT RESEARCH MM3000 Motion Controllers 2ea SDI PDM-40a Control Boxes SDI Temperature Control Box SDI Corona Switch Box SDI I/O Control Box SDI Opto Coupler SDI BNC Switch Box SDI 12V/24V Power Supply SDI Height Sensor Control Box SDI Vacuum/Pneumatic Control Box WAVETEK Model 29 10 MHz DDS Function Generator 2ea BERTRAN 2341-1 High Voltage Power Supplies EG&G 7265 DSP Lock-In Amplifier HEWLETT PACKARD Vectra VE6/450 Computer 3.5” Floppy Disc Drive 100GB Jazz Drive MITSUBISHI LXA550W LCD Monitor OMEGA HX92 Humidity Sensor/Transmitter ADE 3800 Probe Sensor Control Box

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    OEM Model Description

    The SEMILAB FAaST 330 is an electrical metrology system that uses non-contact methods to measure the properties of materials. It combines two patented techniques, known as Micro and Macro corona-Kelvin methods, into one platform. This system is designed to support both advanced research and development and high-volume manufacturing environments. The FAaST 330/230 DSPV systems provide fast, non-contact monitoring of heavy metal contamination in wafers, with the ability to detect even very low levels of contamination. The FAaST 330/230 C-V / I-V systems use advanced measurement techniques to provide non-contact imaging of dielectric and interface properties on monitor wafers. These systems include automated wafer handling and are suitable for medium to high-volume manufacturing environments.

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