
Description
implanterConfiguration
Equipment size: * Main body approx. 8300 x 3300 (plus 650 mm when the door opens) * Exterior devices approx. 2950 x 850 (plus 1400 mm when the door opens) Configuration: * ESC temperature confirmation (A series high temperature and B series normal temperature) A: 500℃ B: 24℃ * Energy range: Monovalent → 350keV, Divalent → 700keV Compatible with double/triple chargeOEM Model Description
None ProvidedDocuments
No documents
Verified
CATEGORY
Ion Implantation
Last Verified: 11 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
139224
Wafer Sizes:
4"/100mm
Vintage:
2010
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ULVAC
IH-860DSIC
CATEGORY
Ion Implantation
Last Verified: 11 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
139224
Wafer Sizes:
4"/100mm
Vintage:
2010
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
implanterConfiguration
Equipment size: * Main body approx. 8300 x 3300 (plus 650 mm when the door opens) * Exterior devices approx. 2950 x 850 (plus 1400 mm when the door opens) Configuration: * ESC temperature confirmation (A series high temperature and B series normal temperature) A: 500℃ B: 24℃ * Energy range: Monovalent → 350keV, Divalent → 700keV Compatible with double/triple chargeOEM Model Description
None ProvidedDocuments
No documents